Description
Introduce
LaAlO3 single crystal provides a good lattice match to most materials with Perovskite structure. It is an excellent substrate for epitaxial growth of HTS and many oxide thin films. LaAlO3 single crystal has also been used widely for special optical windows and as high quality sputtering target. RMJ has the full production line to manufacture first the high purity LaAlO3 powder, then the single crystal boules and finally the epi-polished substrates in many sizes. This allows us to provide LaAlO3 single crystal products with the highest quality and the lowest price to our customers all over the world.
Substrate Specifications
- Maximum Size:Diameter 3 inch, and other size call for me
- Orientation: (100) +/-0.5 Deg
- Edge orietation Indication: <001> +/-2 Deg avaiable as option.
- Polish: EPI polished by CMP tecnology with less sub-surface lattice damage.
- Surface finish (RMS or Ra): <5A
- Pack: Packed in 100 grade plastic bag under 1000 class clean room.
Typical Properties:
| Typical Physical Properties | |
| Crystal Structure | Rhombohedral at 25 oC: a=3.79 Å c= 13.11 Å Cubic at > 435 oC : a=3.821 Å |
| Growth Method | Czochralski |
| Density | 6.52 g/cm3 |
| Melt Point | 2080 oC |
| Termal expansion | 10 (x10-6/ oC) |
| Dielectric Constant | ~ 25 |
| Loss Tangent at 10 GHz | ~3×10-4 @ 300K , ~0.6 x10-4 @77K |
| Color and Appearance | Tan to Brown based on annealing condition Visible twins on polished substrate. |
| Chemical Stability | soluble in mineral acids at 25 oC and soluble in H3PO3 at> 150 oC |
| Standard Products | |
| As – grown boule <100> | 3″ dia x 50 ~ 70 mm length 2″ dia x 50 ~ 70 mm length |
| As cut blank <100> | 3” dia x 0.7 mm , 2″ dia x 0.7 mm 1″ dia x 0.7 mm |
| Epi -polished substrates <100> ori. 1 or 2 sides polished Ra< 8 Å by AFM certified |
3”dia x 0.5 mm, 2″ dia x 0.5 mm 1″ dia x 0.5 mm 1”x1”x0.5 mm 0.5″ x 0.5″ x 0.5 mm 10x10x0.5 mm |
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