Description
Applications
Mainly used in LCD, TFT, CF, Touch Panel, OLED, PDP and other flat panel display indutry; HDI, FPC adn other PCB industry.
Chrome Mask Specifications （Standard Size:430mm×430mm)
|
Items / Class
|
Grade 1
|
Grade 2
|
Grade 3
|
Grade 4
|
|
Min.Line/Space Width
|
1.0μm/1.0μm | 5μm/5μm | 10μm/10μm | 20μm/20μm |
|
CD Control
|
±0.15μm （QZ） | ±0.5μm | ±1.0μm | ±2.0μm |
|
Total Pitch Accuracy
|
±0.5μm（QZ） | ±1.0μm | ±2.0μm | ±2.0μm |
|
Registration Accuracy
|
±0.5μm（QZ） | ±1.0μm | ±2.0μm | ±3.0μm |
|
Overlay Accuracy
|
±0.5μm（QZ） | ±1.0μm | ±2.0μm | ±3.0μm |
|
Orthogonality
|
±0.75μrad | ±2.0μrad | ±3.0μrad | ±4.0μrad |
Substrate(Photomask blank phate)
| Material | Soda Lime Glass、Quartz |
| Max. Size | 1100mm×1100mm |
| Normal Size |
406.4mmx457.2mm,420mmx520mm,450mmx550mm,580mmx609.6mm,
609.6mmx711.2mm,620mmx720mm,700mmx800mm,800mmx960mm
|
| Thickness | 2.3±0.2mm,3.0±0.2mm ,4.8±0.2mm ,7.8±0.2mm 5.0±0.2mm (QZ),8.0±0.2mm (QZ) |
| Film Type | Low Reflectance Chrome |
| Optical Density（λ=450nm） | Between Plates3.0±0.3 In Plate±0.3 |
| Reflectivity（λ=436nm） | Between Plates10±5% In Plate±2% |
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